Letters Acoustic Properties of Alumina Colloidal / Polymer NanoComposite Film on Silicon
Rui Zhang,Wenwu Cao,Qifa Zhou,Jung Hyui Cha,K. Kirk Shung,Yuhong Huang
2010-01-01
Abstract:Alumina colloidal/polymer composite films on silicon substrates have been successfully fabricated using the sol-gel method, in which the crystallite sizes of alumina are between 20 and 50 nm. The density and ultrasonic phase velocities in these films with different alumina ratios from 14% to 32% were measured at the desired operating frequency. We have proved that the density, acoustic phase velocities, and hence the acoustic impedance of the nanocomposite films increase with the alumina content, which gives us another option of tailoring the acoustic impedance of the nano-composite film for making the matching layer of high-frequency medical ultrasonic transducers. Q acoustic matching layers between the piezoelectric material, whose acoustic impedance is usually ∼30 Mrayls, and the propagating medium, whose acoustic impedance is ∼1.5 Mrayls, are critical for the performance of broadband biomedical ultrasonic transducers. Nowadays, most of the matching layers are made of composite materials, because single-phase materials that meet the need of the acoustic impedance requirements do not exist in nature. By mixing the highimpedance powder and low-impedance polymer, the acoustic impedance of the composite can be easily tailored by varying the volume fractions of the components in the composite to meet the design requirements [1]. Compared to those transducers with lower center frequency, high-frequency ultrasonic transducers can provide higher resolution in both axial and lateral directions, resulting in improved imaging quality for the diagnosis of many diseases and in better monitoring of medical treatments [2], [3]. The quarter-wavelength acoustic matching layers become very thin at high frequencies. For a 100MHz transducer made of Pb(Zr,Ti)O3 (PZT) piezoceramics, the matching layer thickness is less than 5 μm. Generally, silver/epoxy composites are used as the first matching layer by lapping down the material to a desired thickness Manuscript received March 3, 2006; accepted July 15, 2006. This research was sponsored by the NIH Grant for the Ultrasonic Transducer Engineering Resource (Grant No. P41-EB2182-07). R. Zhang is with the Department of Physics, Harbin Institute of Technology, Harbin, Heilongjiang, China. W. Cao is with the Materials Research Institute, The Pennsylvania State University, University Park, PA 16802 (e-mail: cao@math.psu.edu). Q. Zhou, J. H. Cha, and K. K. Shung are with the Department of Biomedical Engineering and NIH Transducer Resource Center, University of Southern California, Los Angeles, CA 90089. Y. Huang is with Chemat Technology, Inc., Northridge, CA 91324. Digital Object Identifier 10.1109/TUFFC.2007.270 [4]; however, it is difficult to obtain a homogeneous thin matching layer using 1.5-μm silver particles. Therefore, the conventional processing method of hand mixing metal particles with polymer matrix becomes very challenging for the fabrication of high-frequency composite matching layers with homogeneous properties. In this letter, we report the successful fabrication of an alumina colloidal/polymer composite film using the solgel coating process [5]. The particle size in the film is less than 50 nm and the uniformity of the properties is guaranteed even for submicron-thickness film. The acoustic properties of the nano-composite films with alumina content from 14% up to 32 wt % were measured at the operating frequency of the transducers, and it was found that the acoustic impedance is in the desired range. The fabrication process is as follows. Alumina colloidal was mixed with polymer in the presence of a coupling reagent and water. The hydroxyl group on the surface of the nano-alumina condensed with polymer to form a homogeneous nano-composite. Adhesion promoter was added to ensure good adhesion to the substrate. Ethanol was added to achieve the desired concentration of adhesion promoter. The desired concentration was determined by the ratio between the adhesive and ethanol. The mixture solution was deposited onto silicon substrate by spin coating at 2000 rpm for 30 seconds. The substrate was then placed on a hot plate to evaporate the solvent. Each film layer thickness was about 6–8 μm, and the sample was placed in an oven to age for a time period after each coating. The coating process was repeated until the desired thickness was achieved. Five samples with a thickness of 24 μm were prepared, and the alumina contents in these samples were 14%, 18%, 28%, 30%, and 32%, respectively. The cross-section scanning electron micrograph of the film shown in Fig. 1(a) revealed that alumina colloidal crystallites were homogeneously distributed in the composite, which was impossible to obtain using conventional mixing methods. The film surface is perpendicular to the white arrow in this figure. There were no observable layer interfaces on the micrograph between different coatings. The average alumina crystallite size is around 32 nm, with distribution primarily between 20 and 50 nm as shown in Fig. 1(b). The thickness d at the corresponding operating frequency f of the polymer nano-composite films can be determined by using the method described in [6]. The experimental setup for the ultrasonic measurement is shown in Fig. 2. Two immersion-type broadband ultrasonic transducers (Panamatrix V358; Panametrics, Waltham, MA) with a center frequency of 50 MHz and a one-way −6 dB bandwidth of 75% were used for the measurements. The transmitting transducer was driven by a 200MHz computer-controlled pulser (Panametrics 5052PR), 0885–3010/$25.00 c © 2007 IEEE Authorized licensed use limited to: Harbin Institute of Technology. Downloaded on January 30, 2010 at 20:37 from IEEE Xplore. Restrictions apply. 468 ieee transactions on ultrasonics, ferroelectrics, and frequency control, vol. 54, no. 3, march 2007