Raman Spectroscopy Study of Low Energy He+ Ion Irradiation Effect in Graphene Transferred Onto Sio2

Chenxing Deng,Weiwei Lin,Sylvain Eimer,Dafine Ravelosona,Claude Chappert,Weisheng Zhao
DOI: https://doi.org/10.1109/nano.2013.6720857
IF: 3.5
2013-01-01
Nanotechnology
Abstract:We studied the low energy (5.4 keV) He+ ion irradiation effect on the properties of chemical vapor deposited graphene transferred onto SiO2/Si substrate. For a small dose density of 4 × 1012 He+/cm2, both the G and 2D bands in the Raman spectra exhibit blue-shift and the intensity ratio of the 2D and G peaks decreases. The intensity ratio of the D and G peaks increases a lot as the dose density is larger than 1.2 × 1013 He+/cm2. It suggests that before the formation of large amount of defects, low energy He+ ion irradiation may induce charge-transfer doping in graphene due to the presence of polymer residues. Broad spatial distributions of the band shift and the intensity ratio indicate inhomogeneity of doping level in graphene.
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