All-silicon Telecom Wavelength Detector Fabricated on Silicon-on-insulator

Laurent-Daniel Haret,Xavier Checoury,Zheng Han,Philippe Boucaud,Sylvain Combrie,Alfredo de Rossi
DOI: https://doi.org/10.1109/ecoc.2010.5621305
2010-01-01
Abstract:We demonstrate an ultra-compact all-silicon metal-semiconductor-metal photodetector operating in the telecom band. Resonant absorption is obtained through two-dimensional photonic crystal cavities on silicon-on-insulator with quality factors around 80,000. The waveguide integrated detector exhibits a cw response up to 20 mA/W.
What problem does this paper attempt to address?