Abstract:Plasmonic nanoscale devices/structures have gained more attention from researchers due to their promising functions and/or applications. One important technical focus on this rapidly growing optical device technology is how to precisely control and fabricate nanostructures for different functions or applications (i.e., patterning end points should locate at/near the interface while fabricating these plasmonic nanostructures), which needs a systematic methodology for nanoscale machining, patterning, and fabrication when using the versatile nanoprecision tool focused ion beam (FIB), that is, the FIB-assisted interface detection for fabricating functional plasmonic nanostructures. Accordingly, in this work, the FIB-assisted interface detection was proposed and then successfully carried out using the sample-absorbed current as the detection signal, and the real-time patterning depth control for plasmonic structure fabrication was achieved via controlling machining time. Besides, quantitative models for the sample-absorbed currents and the ion beam current were also established. In addition, some nanostructures for localized surface plasmon resonance biosensing applications were developed based on the proposed interface detection methodology for FIB nanofabrication of functional plasmonic nanostructures. It was shown that the achieved methodology can be conveniently used for real-time control and precise fabrication of different functional plasmonic nanostructures with different geometries and dimensions.

Nano-Machined Transmission Gratings For Atom Interferometer Gyroscope Applications

Optimization and Fabrication of Chromium Grating in Self-Traceable Interferometer

Analysis of a Lloyd's Mirror Interferometer for Fabrication of Gratings

Nanoimprinted Polymer Micro/Nanofiber Bragg Gratings for High-Sensitivity Strain Sensing

Fabrication Technique of Nano-Grating Using Afm

Technique of Nano-Grating Fabricated by AFM

Nano-Grating Fabrication Technique

The fabrication of high-performance diffraction gratings via vibration-assisted UV nanoimprinting lithography

Fabrication of nanoscale gratings with reduced line edge roughness using nanoimprint lithography

Development of the Technique for Fabricating Submicron Moiré Gratings on Metal Materials Using Focused Ion Beam Milling

The Technique for Fabricating Submicron Moiré Grating Using FIB Milling

A nanoimprint lithography for fabricating SU-8 gratings for near-infrared to deep-UV application

Fabrication of high-frequency moiré gratings for microscopic deformation measurement using focused ion beam milling

The Design, Fabrication and Performance of A Large Area 10000 Line/Mm Metal Transmission Diffraction Gratings for Soft X-Ray

A New Grating Fabrication Technique on Metal Films Using UV-Nanoimprint Lithography

Focused Ion Beam Assisted Interface Detection for Fabricating Functional Plasmonic Nanostructures

Micro/Nano Grating and Its Application to Moire Measurement

Nano-fabrication System Based on Atomic Force Microscopy

Butterfly-Inspired 2 D Periodic Tapered-Staggered Subwavelength Gratings Designed Based on Finite Difference Time Domain Method

Study of Moiré Grating Fabrication on Metal Samples Using Nanoimprint Lithography

Method for Fabricating Large-Area Gratings with a Uniform Duty Cycle Without a Spatial Beam Modulator