Fast Determination of Sample Thickness Through Scanning Moiré Fringes in Scanning Transmission Electron Microscopy.

Pengfei Nan,Zhiyao Liang,Yue Zhang,Yangrui Liu,Dongsheng Song,Binghui Ge
DOI: https://doi.org/10.1016/j.micron.2022.103230
IF: 2.381
2022-01-01
Micron
Abstract:Sample thickness is an important parameter in transmission electron microscopy (TEM) imaging for interpreting image contrast and understanding the relationship between properties and microstructure. In this study, we introduce a method for sample thickness determination in scanning TEM (STEM) mode based on scanning moiré fringes (SMFs). Focal-series SMF imaging is used and sample thickness can be determined in situ at a medium magnification range, with beam damage and contamination avoided to a large extent. It provides a fast and convenient approach for determining sample thickness in TEM imaging, which is particularly useful for beam-sensitive materials.
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