Abstract:In precision motion control, well-designed feedforward control can effectively compensate the reference-induced tracking error. To achieve excellent tracking performance such as nanometer accuracy regardless of reference variations, an integrated model-data-based zero-phase error tracking feedforward control (ZPETFC) strategy is synthesized for precision motion systems with complex and nonminimum phase (NMP) dynamics. The feedforward controller comprises a conventional ZPETFC controller and a gain compensation filter structured with symmetric finite impulse response (FIR) filter. Especially, the conventional ZPETFC is predesigned based on the plant model, and consequently, the feedforward controller is parameterized by the gain compensation filter coefficients, which results in excellent capacity for approximating the inverse behavior of the complex and NMP dynamics. In order to compensate the modeling error in the conventional ZPETFC design and improve the tracking performance, a data-based instrumental-variable method with impulse response experiment is developed to obtain the optimal parameter vector under the existence of noise and disturbances. Furthermore, the ridge estimate method using singular value decomposition is employed to guarantee a fast convergent iteration in the case of ill-conditioned Hessian matrix. The proposed ZPETFC strategy enables a convex optimization procedure with the inherent stability in the iterative tuning process, and is finally implemented on a developed ultraprecision wafer stage. Comparative experimental results demonstrate that the strategy is insensitive to reference variations in comparison with iterative learning control, and outperforms preexisting model-based ZPETFC and data-based FIR feedforward control.

MIMO Data-Driven Feedforward Tuning for the Ultra-precision Wafer Stage Using Rational Basis Functions

Data-driven rational feedforward tuning: With application to an ultraprecision wafer stage

Towards a multivariable auto-tuner

Data‐driven Parameter Tuning for Rational Feedforward Controller: Achieving Optimal Estimation Via Instrumental Variable

Convergence Rate Oriented Iterative Feedback Tuning with Application to an Ultraprecision Wafer Stage

Optimal feedforward control with a parametric structure applied to a wafer stage.

A Data-Driven Variable-Gain Control Strategy for an Ultra-Precision Wafer Stage with Accelerated Iterative Parameter Tuning

Rational Feedforward Tuning Using Variance-Optimal Instrumental Variables Method Based on Dual-Loop Iterative Learning Control.

Data-Driven Iterative Feedforward Tuning for a Wafer Stage: A High-Order Approach Based on Instrumental Variables

Adaptive Control of Vertical Stage of A Robot Arm for Wafer Handling

A Data-Driven Iterative Decoupling Feedforward Control Strategy with Application to an Ultraprecision Motion Stage

Three-axis vibration control based on drive spectrum modified iterative control algorithm

Data-Driven MIMO Feedforward Control Approach Based on Measured Step Response

An Integrated Model-Data-Based Zero-Phase Error Tracking Feedforward Control Strategy with Application to an Ultraprecision Wafer Stage.

LFT-Structured Uncertainty State-Space Modeling for State Feedback Robust Control of the Ultra-Precision Wafer Stage

Data-Based Switching Feedforward Control for Repeating and Varying Tasks: with Application to an Ultraprecision Wafer Stage.

Data-Driven Feedforward Learning With Force Ripple Compensation for Wafer Stages: A Variable-Gain Robust Approach

Pole Assignment Control of MIMO Motion Systems with Flexible Structures and Its Application to an Ultraprecision Wafer Stage

Real-Time Iterative Compensation Control Using Plant-Injection Feedforward Architecture with Application to Ultraprecision Wafer Stages

Experimentally-efficient data-driven rational feedforward control for multivariable systems

Integrated Rational Feedforward in Frequency-Domain Iterative Learning Control for Highly Task-Flexible Motion Control