Investigation on the Influence of Macro-micro Grating Parameters on Diffraction Characteristics through FDTD Simulation

Yaowen Ban,Biao Lei,Guoyong Ye,Guobo Zhao,Zhenghui Zhang,Hongzhong Liu
DOI: https://doi.org/10.1109/ICOIM52180.2021.9524409
2021-01-01
Abstract:The grating is the displacement measurement standard, and the diffraction efficiency of the diffracted light of the grating mainly determines the accuracy of the displacement measurement system. In this work, through three-dimensional finite-difference time-domain (FDTD) method simulation, the diffraction efficiency of the ±1st order diffracted light of the transmission diffraction grat...
What problem does this paper attempt to address?