Method for preparing noncrystalline-nanocrystalline composite membrane by adopting co-sputtering method

Huang Ping,Wang Fei,Li Jiamei,Xu Kewei
2013-01-01
Abstract:The invention discloses a method for preparing a noncrystalline-nanocrystalline composite membrane by adopting a co-sputtering method, wherein a mixture thin membrane with a noncrystalline phase and a crystalline phase coexisting is prepared by means of implementing double-target magnetron sputtering on a matrix and simultaneously depositing the noncrystalline phase and a nanocrystalline phase. The noncrystalline co-sputtered membrane prepared by the method has a high creep strain rate sensitive value, an excellent mechanical property and uniform plastic deformation. By virtue of the method which is simple and feasible, the noncrystalline mixture thin membrane with the noncrystalline phase and the crystalline phase coexisting is prepared. The thin membrane can be widely applied to the fields of protective coating, functional coating and the like of various precise instruments such as micro electro mechanical systems (MEMS) and nanometer electro mechanical systems (NEMS).
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