The Manufacture And Characterization Of A Novel Ultrasonic Transducer For Medical Imaging

Jian-Song Sheng,Yunfei Zhao,Yancong Qiao,Jiang Ling,Jun Fu,Yi Yang,Tian-Ling Ren
DOI: https://doi.org/10.1109/EDTM50988.2021.9420938
2021-01-01
Abstract:In this research, we demonstrate the design and manufacture of an ultrasonic transducer for medical imaging. The PZT film is used as a piezoelectric material because it has a high piezoelectric coefficient. The COMSOL Multiphysics (R) simulation shows that the resonant frequency of the transducer is 980 kHz, which is suitable for medical imaging. The structure of 16x16 is adopted as the array of ultrasonic transducer. Furthermore, the equivalent circuit of the device is analyzed and the experimental results show that the Piezoelectric micromachined ultrasonic transducer (pMUT) array has a suitable resonance frequency and a higher effective electromechanical coupling coefficient, suitable for medical imaging.
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