Abstract:Heat flux sensors (HFSs) are extensively used in combustion-related applications to collect important engineering data. However, most non-water cooling HFSs lack the durability to survive in the harsh, high-temperature environments where they are employed. A new type of thin-film HFS based on a W-5Re/W-26Re thermocouple has been developed for high-temperature heat flux measurement. The sensor consists of 136 pairs of micron-sized W-5Re/W-26Re thin-film thermocouples, an SiO2 thermal-resistance layer, and an AlN substrate. The SiO2 layer is sandwiched between the substrate and thermocouples, and allows the measurement of temperature differences arising from the difference in thermal conductivity between the substrate and the SiO2 layer. A protective layer with a sandwich structure prevents the tungsten-rhenium thin film from oxidizing at high temperatures in air. This small HFS with a protective layer can survive for 1 h in 1000°C air. Calibration data show that the HFS exhibits repeatable and fast thermal responses when a pulsed heat flux of 1000 kW/ $text{m}^{2}$ is applied, and its sensitivity is 3.8* $10^{-6}$ V/(kW/ $text{m}^{2}$ ). The experimental data agree with the simulated results. It can be concluded from the experimental results that the tungsten-rhenium thin film has a good thermoelectric response to high temperatures after the size is reduced to a micron. Thus the developed HFS can be a suitable alternative for applications in thermal systems, such as engines, turbines, and rockets.

A Tungsten-Rhenium Thin Film Thermocouples Sensor Based on AlN Transition Layer.

Thermoelectric Characteristics of Silicon Carbide and Tungsten-Rhenium-Based Thin-Film Thermocouples Sensor with Protective Coating Layer by RF Magnetron Sputtering

A Protected Tungsten-Rhenium Thin Film Thermocouples Sensor

Simulation, Fabrication, and Characteristics of High-Temperature, Quick-Response Tungsten–rhenium Thin-Film Thermocouples Probe Sensor

Ito Thin Film Resistance Temperature Detector with Al/Al2O3 Protective Coating for High-Temperature Application

WRe26-In<sub>2</sub>O<sub>3</sub> probe-type thin film thermocouples applied to high temperature measurement

Tungsten-rhenium Thin Film Thermocouples for SiC-based Ceramic Matrix Composites.

WRe26-In2O3 probe-type thin film thermocouples applied to high temperature measurement.

Research on Measurement and Process of Tungsten-Rhenium Thin Film Thermocouples Sensor.

High-Temperature Heat Flux Sensor Based on Tungsten–Rhenium Thin-Film Thermocouple

Fabrication and performance study of high temperature thin film sensor

Influences of RF Magnetron Sputtering Power and Gas Flow Rate on a High Conductivity and Low Drift Rate of Tungsten-Rhenium Thin-Film Thermocouples.

Enhanced La0.8Sr0.2CrO3/Pt Thin Film Thermocouple with Al2O3 Coating Layer for High Temperature Sensing

Mechanical Properties Analysis and Process Optimization for Tungsten-Rhenium Thin Film Thermocouples Sensor.

Horizontal Oxidation Diffusion Behavior of MEMS-Based Tungsten-Rhenium Thin Film Thermocouples

Flexible Miniaturized Thin Film Thermocouples Arrays for High Temperature Applications

High Temperature Thin-Film Sensor Technologies For Advanced Propulsion Materials

A New Method of Making Thin-Film Thermocouples at Sharp Surfaces of Aero-engine Hot Component

Effect of Heat Treatment on Thermoelectric Properties of Tungsten-Rhenium Thin-Film Thermocouples by RF Magnetron Sputtering

Design and Fabrication of Thermocouple Sensors Based on a Ceramic Curved Alumina Substrate

Sandwich Probe Temperature Sensor Based on In2O3-IZO Thin Film for Ultra-High Temperatures