Novel Physics-Based Small-Signal Modeling and Characterization for Advanced RF Bulk FinFETs

Wenyuan Zhang,Sen Yin,Wenfei Hu,Yan Wang
DOI: https://doi.org/10.1109/ted.2021.3063211
IF: 3.1
2021-01-01
IEEE Transactions on Electron Devices
Abstract:A novel RF small-signalmodel in the formof a physics-based equivalent circuit for advanced bulk FinFETs is proposed. Based on the uniquemultifin structure, parallel resistance-capacitancebranches are introduced to account for the gate-source and gate-drain admittances. The deembedding is carefully performed after its effectiveness is verified by accurately modeling the pad and interconnect parasitics. An analytical method is developed to directly extract the model parameters from measurements. The model is validated in 7 and 14 nm bulk FinFET technologies, and the modeled results show an excellent agreement with the measured data up to 50 GHz (similar to f(T)/4). The dependencies of FinFET RF performances on the layout dimensions are investigated, and they are compared between the two advanced FinFET technologies.
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