Abstract:Advances in micro- and nanofabrication technologies have enabled the development of novel micro- and nanomechanical resonators which have attracted significant attention due to their fascinating physical properties and growing potential applications. In this review, we have presented a brief overview of the resonance behavior and frequency tuning principles by varying either the mass or the stiffness of resonators. The progress in micro- and nanomechanical resonators using the tuning electrode, tuning fork, and suspended channel structures and made of graphene have been reviewed. We have also highlighted some major influencing factors such as large-amplitude effect, surface effect and fluid effect on the performances of resonators. More specifically, we have addressed the effects of axial stress/strain, residual surface stress and adsorption-induced surface stress on the sensing and detection applications and discussed the current challenges. We have significantly focused on the active and passive frequency tuning methods and techniques for micro- and nanomechanical resonator applications. On one hand, we have comprehensively evaluated the advantages and disadvantages of each strategy, including active methods such as electrothermal, electrostatic, piezoelectrical, dielectric, magnetomotive, photothermal, mode-coupling as well as tension-based tuning mechanisms, and passive techniques such as post-fabrication and post-packaging tuning processes. On the other hand, the tuning capability and challenges to integrate reliable and customizable frequency tuning methods have been addressed. We have additionally concluded with a discussion of important future directions for further tunable micro- and nanomechanical resonators.

Low-loss and High-Resolution Mechanical Mode Tuning in Microspheres.

Arbitrary Function Resonance Tuner of the Optical Microcavity with Sub-Mhz Resolution.

Broadband Tuning of the Optical and Mechanical Modes in Hollow Bottle-Like Microresonators

Integrated tuning fork nanocavity optomechanical transducers with high $f_{M}Q_{M}$ product and stress-engineered frequency tuning

Tunable Mechanical-Mode Coupling Based on Nanobeam-Double Optomechanical Cavities

Tunable Micro- and Nanomechanical Resonators

Optomechanics in anisotropic liquid crystal -filled micro-bubble resonators.

A Novel Mechanical Frequency Tuning Method Based on Mass-Stiffness Decoupling for MEMS Gyroscopes

Magnetic tuning with minimal thermal drift in high-Q microspheres coated with magnetorheological polydimethylsiloxane

Towards thermal noise free optomechanics

High-Q Whispering Gallery Modes in a Polymer Microresonator with Broad Strain Tuning

A Low-Frequency Chip-Scale Optomechanical Oscillator with 58 Khz Mechanical Stiffening and More Than 100Th-Order Stable Harmonics

Effective quality factor tuning mechanisms in micromechanical resonators

Mechanical Bound State in the Continuum for Optomechanical Microresonators

Selective Passive Tuning of Cavity Resonance by Mode Index Engineering of the Partial Length of a Cavity

Centimeter-scale nanomechanical resonators with low dissipation

In-situ tuning of optomechanical crystals with nano-oxidation

Characterization of Microresonator-Geometry-deformation for Cavity Optomechanics.

Optically-controlled Extinction Ratio and Q-factor Tunable Silicon Microring Resonators Based on Optical Forces.

Torsional Frequency Mixing and Sensing in Optomechanical Resonators

Tuning on Optical Resonances of Microcavities Based on Thermal Dissipation Control