An Estimation Method (EM) of Generalized Displacement of Points of Interest (pois) Using Critical Modes

Li Yujie,Zhu Yu,Zhang Ming,Li Xin,Wang Leijie
DOI: https://doi.org/10.1007/s12541-020-00377-x
2021-01-01
Abstract:More lightweight structure and higher control bandwidth are highly desirable in next-generation motion stages, satisfying the continuously increasing requirements in throughput and accuracy. However, these lead to more severe flexible deformation, causing that the estimation accuracy of the generalized displacements of a point of interest (POI) cannot be guaranteed under the rigid-body assumption. In this paper, a method for estimating the generalized displacement of the POI using critical modes is proposed. This method can realize a more accurate estimation under the limited measurement points. In this method, since the number of measurement points is limited, the selection criterion of the critical modes is firstly proposed for the over-actuator system; then, with regard to the estimation accuracy, the influences of the measurement layout and the residual modes on the estimation matrix are analyzed mathematically, and a performance measure is proposed for evaluating this method from the perspective of system control. In the verification section, the validity of the estimation method is demonstrated through numerical simulation and an experiment on a representative but straightforward case using a plate structure.
What problem does this paper attempt to address?