A micro fiber optic vibration sensor fabricated by femtosecond laser for high temperature applications

Liuchao ZHANG,Yi JIANG,Sumei WANG,Da LIU
DOI: https://doi.org/10.13741/j.cnki.11-1879/o4.2017.04.010
2017-01-01
Optical Technique
Abstract:A micro vibration sensor fabricated by femtosecond laser for high-temperature applications is demonstrated.The sensor is based on the configuration of an extrinsic Fabry-Perot interferometer (EFPI), which is formed by a hollow core fiber (HCF) sandwiched between two sections of single mode fiber (SMF).Part of the HCF is removed by a femtosecond laser and a cantilever beam is obtained.A section of the SMF acting as the mass block can oscillate vertically when the sensor is subject to vibration.Within the frequency range of 20-300Hz, the experimental results show that the sensitivity of 129.6nm/g@100Hz is achieved in the acceleration range from 0 to 3.01g.The temperature response of the EFPI cavity is 0.225nm/℃.The sensor can operate stably at a high temperature of 950℃.
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