Analysis of High-Q Optical Microtoroid Cavity by CO2 Laser
JIA Pengfei,YAN Shubin,GUO Tao,LIU Jun,XIONG Jijun
DOI: https://doi.org/10.3969/j.issn.1004-1699.2011.03.029
2011-01-01
Abstract:Recently high-Q optical cavity has been widely researched.As the microcavity inherited the high optical quality and WG mode,it was popular in low threshold laser,electrodynamics(QED)experiments,nonlinear optics,as well as bio-chemical sensing.MEMS technology was used for manufacture microdisk cavity.We designed physical model and analyzed the temperature distribution theoretically.Furthermore,thermal stress of different microtoroids under CO2 laser has been tested with Raman Spectral Analyzer.The results showed that the further the distance from the center of the cavity,the bigger the intermolecular tension is.Quality factor of the microtoroidal cavity was also tested by taper evanescent-field coupling.According to the testing results,the average value can be up to 4.8×105 and the coupling efficiency is 95%.