Abstract:A mechanistic understanding of interactions be-tween atomically thin two-dimensional (2D) transition-metal dichalcogenides (TMDs) and their growth substrates is important for achieving the unidirectional alignment of nuclei and seamless stitching of 2D TMD domains and thus 2D wafers. In this work, we conduct a cross-sectional scanning transmission electron microscopy (STEM) study to investigate the atomic-scale nucleation and early stage growth behaviors of chemical vapor deposited monolayer (ML-) MoS2 and molecular beam epitaxy ML-MoSe2 on a Au(111) substrate. Statistical analysis reveals the majority of as-grown domains, i.e., similar to 88% for MoS2 and 90% for MoSe2, nucleate on surface terraces, with the rest (i.e., similar to 12% for MoS2 and 10% for MoSe2) on surface steps. Moreover, within the latter case, step-associated nucleation, similar to 64% of them are terminated with a Mo-zigzag edge in connection with the Au surface steps, with the rest (similar to 36%) being S-zigzag edges. In conjunction with ab initio density functional theory calculations, the results confirm that van der Waals epitaxy, rather than the surface step guided epitaxy, plays deterministic roles for the realization of unidirectional ML-MoS2 (MoSe2) domains on a Au(111) substrate. In contrast, surface steps, particularly their step height, are mainly responsible for the integrity and thickness of MoS2/MoSe2 films. In detail, it is found that the lateral growth of monolayer thick MoS2/MoSe2 domains only proceeds across mono-Au-atom high surface steps (similar to 2.4 angstrom), but fail for higher ones (bi-Au atom step and higher) during the growth. Our cross-sectional STEM study also confirms the existence of considerable compressive residual strain that reaches similar to 3.0% for ML-MoS2/MoSe2 domains on Au(111). The present study aims to understand the growth mechanism of 2D TMD wafers.

In-situ AFM Study on Growth Process of the (100) Face of ZTS Crystal

In situ AFM observations on the defects of ZTS crystals

Ex situ investigation of the step bunching on the (1 0 0)face of ZTS crystal by AFM

Distinct Growth Phenomena Observed on Zinc Cadmium Thiocyanate Crystals by Atomic Force Microscopy

In Situ Study on Nucleation Mechanism and Surface Morphology of Zinc Thiourea Sulfate Crystals

Atomistic Insight into the Epitaxial Growth Mechanism of Single-Crystal Two-Dimensional Transition-Metal Dichalcogenides on Au(111) Substrate

Atomic Force Microscopy Studies on Growth Mechanisms and Defect Formations on {110} Faces of Cadmium Mercury Thiocyanate Crystals

EX SITU ATOMIC FORCE MICROSCOPY STUDIES OF SURFACE MORPHOLOGY ON {001} FACES OF MMTWD CRYSTALS

Micro Topography of KDP Crystals Phase Interface and Macrostep Formation Observed by Atomic Force Microscope

Growth Morphology of {100} Faces of Zinc Cadmium Thiocyanate Crystal Investigated by Atomic Force Microscopy

Investigation of Growth Mechanisms of TSS-grown KLu(WO4)2 Crystals by Atomic Force Microscopy

The Investigation about the Effect of the Flow on the Kinetics of Step Growth on (100) Face of ZTS Crystal

Atomic Force Microscopy Study On Surface Morphologies Of {110} Faces Of Mnhg(Scn)(4) Crystals

Investigation of Nucleation Growth Mechanism of MMTC Crystal by AFM

Distinct Growth Phenomenon Observed on L-Arg·cf3cooh Crystals

Atomic force microscopy study on surface morphologies of {110} faces of MnHg(SCN) crystals

Atomic Force Microscopy Study on Surface Morphologies of {110} Faces of MnHg(SCN)4 Crystals

Growth Morphology of the {100} Cleavage Faces of Lap Crystals Observed by Afm

AFM study on the morphological change of Zn electrodeposit

Atomic Force Microscopy Studies on Growth Steps and 2d Nuclei on the {100} Faces of Deuterated L-Arginine Phosphate Crystals

Application of the Atomic Force Microscope to Study of Crystal Growth Mechanism