Research status and application progress of non-evaporable film getter

Rui SHAN,Tongtong QI,Bingzhe LI,Jie GUO,Jun YUAN
DOI: https://doi.org/10.3969/j.issn.1001-9731.2018.05.009
2018-01-01
Abstract:The non-evaporable getter film is an important material for obtaining and maintaining vacuum condi-tions for ultra-high or extremely ultra-high vacuum systems.In recent years,getter is widely used in MEMS vacuum packaging field.In this paper,the material system,research status and engineering application of non-evaporative getter were reviewed.The research status,the main problems and development trend of the getter film at home and abroad were introduced.The working principle of the getter in the MEMS vacuum packaging system,the challenge of the traditional getter in the field of encapsulation,and the problems and development trends of the film getter in the packaging system were discussed.
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