Research Progress in Preparation of the Nano TiO_2 Thin Films

CHENG Xiao-ling,HU She-jun,KUANG Tong-chun,ZENG Peng,XIE Guang-rong,RU Qiang
DOI: https://doi.org/10.3969/j.issn.1001-3660.2005.04.001
2005-01-01
Surface Technology
Abstract:Based on the current study state of TiO_(2) functional thin film,the preparation methods of titania thin films including chemical vapor deposition,hydrolysis-precipitation,liquid phase deposition,sol-gel dip-coating,sputtering,ion beam enhanced deposition were reviewed.The advantages and disadvantages of different methods were briefly described.[
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