Optimization of electrolytic system for BaTiO3 dielectric films prepared by micro-arc oxidation

Min Wang,Huiyong Guo,Wenfang Li,Guoge Zhang

DOI: https://doi.org/10.13251/j.issn.0254-6051.2014.07.038

2014-01-01

Abstract:Orthogonal test was carried to gain the optimized electrolytic system of BaTiO 3 film prepared by MAO .The phase composition , elemental distribution , surface morphology and dielectric property of the film sample were studied .It is found that the optimized electrolytic system is 0.5 mol/L Ba(OH)2 and 0.1 g nano TiO2 and 0.05 g glycol and 0.2 g glycerin, and the BaTiO3 film prepared with the optimized electrolytic system is composed mainly of tetragonal BaTiO 3 phase and a trace of BaCO 3 and possesses high dielectric constant of 245.3 at the frequency of 100 Hz, also SEM analysis showed that the surface of the film was smooth and the distribution of small MAO holes were uniform .