Abstract:In inertial confinement fusion (ICF) systems, damage induced by high power lasers is one of the key factors for limiting the further improvement of energy density. Also, there is a close relationship between various defects and damage characteristics of optical components. Usually, the optical components detected in the system have a large-aperture and a variety of surface types. The defects have the characteristics of small scale, low distribution density and wide distribution range, etc. It is a great challenge to achieve multi-faceted detection with high precision and efficiency. In this paper, according to the requirements for micro defects detection on the surface of large-aperture optical components, a multimodal scanning detection method combining the bright-field and dark-field imaging (BDFI) is given. Based on the high sensitivity of dark-field microscopic imaging (DFMI), the ring illumination strategy of collimate light source is studied to locate defects globally. The coaxial illumination method is used to accurately detect the characteristic parameters of defects, which is able to realize the size quantification of multi-morphological defects. At the same time, in order to cope with the detection needs of large-aperture and multi-faceted optical components, the sub-aperture scanning method based on the distribution structure of geodesic sphere is proposed. The multi-aperture scanning path is automatically planned and the spatial distribution of defects is reconstructed with three-dimensional mapping. On this basis, by cooperating with the automatic motion device, automatic focus and high-speed automatic scanning of detection can be realized. The methods proposed in this paper can be accomplished for efficient detection of large-aperture optics with a resolution of 0.5 mu m for surface defects, which meets the needs of multi-faceted detection. Therefore, it is of great significance to guide the precision machining of optical components and support the process optimization, which has great importance for the final research results of the ICF system.

Defect detection and current situation of optical components

Detection of Defects in Optics Based on Scanning

Error Analysis of Sub-Aperture Synthesis for Detecting Surface Defects of Optical Components

Defects Evaluation System for Spherical Optical Surfaces Based on Microscopic Scattering Dark-Field Imaging Method

A high-resolution detecting system based on machine vision for defects on large aperture and super-smooth surface

Distortion Correction in Surface Defects Evaluating System of Large Fine Optics

Surface defects evaluation system based on electromagnetic model simulation and inverse-recognition calibration method

Research on Auto-Centering Device in Surface Defects Evaluation System of Large Spherical Optics

Spherical Optical Surface Defects Digitizing Evaluation System

Numerical simulation research and applications on scattering imaging of surface defects on optical components

Error Analysis of Spherical Scanning Mechanism Used for Surface Defects Detection

Alignment Methods for Micron-Scale Surface Defects Automatic Evaluation of Large-Aperture Fine Optics

Defect Detection in Transparent Materials Based on Optical Coherence Tomography

Research on Defect Detection of Large-Aperture Multi-Faceted Optical Components

Review of optical detection technologies for inner-wall surface defects

Diffraction method for inspecting the defects of lenses with various curvature

Automatic Identification and Classification of Surface Defects in Small-Sized Optics

A Dark-Field Surface Defects Detection Method for Multi-Surface-Shape Large Aperture Optical Components

State of the Art in Defect Detection Based on Machine Vision

Width and Depth Gauging of Rectangular Subsurface Defects Based on All-Optical Laser-Ultrasonic Technology

Automated Inspection of Defects in Optical Fiber Connector End Face Using Novel Morphology Approaches