Application Research of STL Technique in Photoelectric Testing of Thin Film Characterization

陈习权,祖小涛,郑万国,蒋晓东,黄祖鑫
DOI: https://doi.org/10.3969/j.issn.1672-3392.2005.01.016
2005-01-01
Abstract:Laser-induced surface deformation is a widely used technique for studying thin film coatings. In this technique, the deformation is typically detected by using the well-known optical beam deflection technique. In this paper we report a different technique in studying the surface deformation by using optical diffraction effect. This new technique is demonstrated to be a sensitive and easy-to-handle method for thin film characterization. The potential of this technique and its advantages over the conventional methods for thin film absorption measurement and defect characteristics are discussed.
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