Optimization Study on Cantilever Piezoelectric Vibration Generator Material Property

Zhen YAN,Qing HE,Dongping WANG,Junfeng LIU
DOI: https://doi.org/10.3969/j.issn.1004-1699.2015.03.010
2015-01-01
Abstract:Piezoelectric vibration generator made in MEMS can infinite and continue to supply energy for low power e-lectric device. For increasing generating capacity of cantilever piezoelectric vibration generator with limited volume, mechanical model accuracy is verified which apply ANSYS finite element,and influence rule of material parameter of cantilever piezoelectric generator to inherent frequency and output voltage are studied,and material parameter is opti-mized analysis aiming maximum output electric energy with minimum volume. The results indicate PZT-4,PZT-5A and PZT-5H piezoelectric materials and stainless steel,nickel alloy substrate material should be firstly chosen.
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