Study on the humidity sensors based on sulfide material

Zhi-yong ZHAO,Tong ZHANG,Hui REN,Bao-kun XU,Wei XU,Hong-qi CHEN,Bao-fu QUAN
DOI: https://doi.org/10.13873/j.1000-97872001.01.004
2001-01-01
Abstract:The sensitive properties of humidity sensors based on ZnS, CdS, Sb2S3,Sb2S5 sulfide materials have been studied. We found that the humidity sensors have excellent sensitivity and stability to relative humidity changing from 11% to 95%. The other properties of humidity sensors, such as frequency characteristic, stability characteristic, response-recovery time, complex impedance plots and humidity hysteresis have also been researched. The sensitive mechanism to humidity is discussed, too.
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