Analysis of Thermal Deformation of Hydrostatic Guideway for Roller Mold Ul-tra-Precision Machine

何文强,王波,乔政,渠达,吴言功
DOI: https://doi.org/10.3969/j.issn.1003-5451.2017.04.003
2017-01-01
Abstract:In order to improve the machining accuracy for the optical microstructure, the thermal deformation analysis of the linear guideway system for the roller mold ultra-precision machine tool is carried out. According to the structural characteristics of hydrostatic guideway, an equivalent method of oil film in finite element analysis is presented and the finite element analysis model is established. The thermal-structure coupling analysis of the linear guideway system of the machine tool is carried out by using the finite element software. The thermal deformation error of linear guideway system is obtained. The method to improve the machining accuracy of the optical micro structure of the roller mould machine is presented. The finite element analysis results are verified by the experiment of micro structure machining.
What problem does this paper attempt to address?