Study of TWT Slow Wave Structure Microfabricated by Ultraviolet Laser

马天军,陈振海,孙建海,伊福廷,刘濮鲲

DOI: https://doi.org/10.3969/j.issn.1003-5451.2015.02.001

2015-01-01

Abstract:Travel wave tube (TWT) is a kind of vacuum device. The slow wave structure becomes smaller and smaller with operating frequency toward THz. The main dimension of folded waveguide tend to micron and tolerances become unmanageable for conventional fabrication techniques. The fabrication techniques of slow wave structure is a key problem for development of high frequency TWT. The ultraviolet laser machining techniques is used for producing the interaction circuits on the substrate of glass wafer. The effect of micro folded waveguide with different laser frequency is analyzed.