Abstract:This work presents a facile chemical‐based strategy for creating centimeter‐scale, well‐defined nanoparticle arrays with single‐particle resolution. The approach enables precise fabrication, scalability, and transferability onto various substrates. The transfer process preserves chemical templates for subsequent replication‐transfer cycles. The method achieves exceptional positional accuracy and ultranarrow surface lattice resonances, offering new avenues for flexible and wearable devices. Nanoparticle (NP) arrays, particularly those with plasmonic properties, have diverse applications in electronics, photonics, catalysis, and biosensing, but their precise and scalable fabrication remains challenging. In this work, a facile chemical‐based strategy is presented for the fabrication of precise NP patterns using a combination of soft thermal nanoimprinting and template‐directed assembly. The approach enables the creation of well‐defined NP arrays with single‐particle resolution and yields over 99%, covering a diverse range of NP sizes from 30 to 150 nm. These patterns can be transferred onto various substrates including semiconductors, insulators, 2D materials, and flexible polymers, maintaining high uniformity and repeatability for over 60 cycles with minimal degradation. Moreover, the method enables the fabrication of extensive NP arrays up to 1 cm2 with a positional accuracy of ±11 nm for 30 nm NPs. As a result, the obtained silver NP arrays exhibit ultranarrow surface lattice resonances with a linewidth of 4 nm and a quality factor (Q) of 216. The method offers new avenues for the creation of plasmonic NP arrays for flexible and wearable devices.

Scalable nucleic acid-based nanofabrication

Multiple-Patterning Nanosphere Lithography for Fabricating Periodic Three-Dimensional Hierarchical Nanostructures.

Near-Atomic Fabrication with Nucleic Acids.

Nanofabrication Based on DNA Nanotechnology

Three-dimensional nanolithography guided by DNA modular epitaxy

Scalable Lithography From Natural Dna Patterns Via Polyacrylamide Gel

Fabrication Of Biomolecular Nanopatterns

DNA Nanostructure Meets Nanofabrication

Direct Nanofabrication Using DNA Nanostructure.

Molecular Lithography with DNA Nanostructures.

Nanolithography Based on Metalized DNA Templates for Graphene Patterning

DNA‐based Nanofabrications

Transfer of Two-Dimensional Oligonucleotide Patterns Onto Stereocontrolled Plasmonic Nanostructures Through Dna-Origami-Based Nanoimprinting Lithography

Three-dimensional nanoscale metal, metal oxide, and semiconductor frameworks through DNA-programmable assembly and templating

Sustainable Fabrication and Transfer of High‐Precision Nanoparticle Arrays Using Recyclable Chemical Pattern Templates

Dna Nanofabrication By Scanning Near-Field Photolithography Of Oligo (Ethylene Glycol) Terminated Sams: Controlled Scan-Rate Dependent Switching Between Head Group Oxidation And Tail Group Degradation

Metallized Dna Nanolithography for Encoding and Transferring Spatial Information for Graphene Patterning

Resilient Three-Dimensional Ordered Architectures Assembled from Nanoparticles by DNA

Coverage Control of Silica-Assisted Grown DNA Crystals

Nanoscale Patterns of Oligonucleotides Formed by Electrohydrodynamic Jet Printing with Applications in Biosensing and Nanomaterials Assembly

3D Lattice Engineering of Nanoparticles by DNA Shells