Optimization Design Of Porous Aerostatic Bearing For Full-Aperture Rapid Planar Polishing Machine

Mingchen Cao,Huiying Zhao,Ruiqing Xie,Shenggen Zhu,Lingyu Zhao,Jinfeng Bai,Dan Ma,Yuxuan Cao,Jianjun Chen
DOI: https://doi.org/10.1117/12.2586832
2021-01-01
Abstract:Full-aperture rapid planar polishing (RPP) equipment has been widely used in optical processing. The polishing shaft used in RPP equipment is supposed to be high precision and stability. With high stability and sustainability of accuracy, the aerostatic bearing is used for RPP machine in this study. To meet the RPP machine's needs, FLUENT was used to analyze the load-bearing characteristics of the high-precision aerostatic bearing. Based on the simulated results, the parameter optimization design for the porous aerostatic bearing was conducted to get better load-bearing characteristics, including bearing capacity, static stiffness and gas consumption. The influence of air supply pressure, porous material thickness and film thickness on bearing characteristics were studied. The simulation analysis was performed to get the optimal design parameters for aerostatic bearing. The simulated results show that the designed high-precision aerostatic bearing can satisfy the requirements of RPP machine.
What problem does this paper attempt to address?