MANUFACTURING AND APPLICATION OF MICRO/NANO FLUIDIC DEVICES

Chong Liu,Zheng Xu,Jun-sheng Liang,Jing-min Li,Jun-shan Liu,Da-zhi Wang
2010-01-01
Abstract:Micro/nano fluidic technologies have experienced a rapid development over the past few years. Micro/nano fluidic devices present uniquely attractive opportunities and benefits for various applications in molecular and cellular biological analysis, microelectronics cooling, micropower, microreaction. Many micro/nano fluidic devices have been exploited and used to sample, trap, separate, sort and analyze biological materials. This chapter describes manufacturing and application of micro/nano fluidic devices. We emphasize a cross-disciplinary view and more technical details aren't included, but available in the listed references. In the first section, the basic components including nanochannel, micromixer, micropump and microvalve are described. Some critical criteria of the mechanisms for the adaptation of a given application are discussed. Then, a brief introduction to some typical materials and related manufacturing principles for the fabrication of micro/nano fluidic devices is given. An overview of the fabrication techniques for thermoplastics-based lab-on-a-chip devices as an example of Micro/Nano fluidic devices are provided in section 3. In section 4, some issues about micro direct methanol fuel cell (mu DMFC) are discussed, including a simple description of historical background, silicon micromachining for mu DMFC, micro photochemical etching of the stainless steel polar plates, and experiments of mu DMFC performance testing.
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