Abstract:Ammonia(NH 3 ) is a toxic gas released in different industrial, agricultural and natural processes. It is also a biomarker for some diseases. These require NH 3 sensors for health and safety reasons. To boost the sensitivity of solid-state sensors, the effective sensing area should be increased. Two methods are explored and compared using an evaporating pool of 0.5 mL NH 4 OH(28% NH 3 ). In the first method an array of Si nanowires(Si NWA) is obtained via metal-assisted-electrochemical etching to increase the effective surface area. In the second method CVD graphene is suspended on top of the Si nanowires to act as a sensing layer. Both the effective surface area as well as the density of surface traps influences the amplitude of the response. The effective surface area of Si NWAs is 100 × larger than that of suspended graphene for the same top surface area, leading to a larger response in amplitude by a factor of 7 notwithstanding a higher trap density in suspended graphene. The use of Si NWAs increases the response rate for both Si NWAs as well as the suspended graphene due to more effective NH 3 diffusion processes.

Ammonia Sensing Using Arrays of Silicon Nanowires and Graphene