Abstract:Scheduling single-robotic-arm cluster tools subject to wafer residency time constraints has received much attention. Compared to some scheduling strategies that use all processing modules (PMs) to process wafers, it is much more challenging to schedule a more general case whose optimal scheduling strategy is not limited to the case of using all PMs. The strategy of only adjusting the robot’s waiting time may fail to produce a desired schedule. When a tool using all PMs is not schedulable, it may become schedulable if only some PMs of a type are used. Therefore, it is very important to select an appropriate number of PMs to process wafers. This work studies the cyclic scheduling problem of wafer-residency-time-constrained single-robotic-arm cluster tools by simultaneously adjusting the number of PMs and robot waiting time. We build a virtual cell that includes an appropriate number of PMs to process wafers with the maximal productivity. We establish sufficient and necessary conditions under which the system is schedulable. The schedulability conditions are less conservative than the state-of-the-art one. A polynomial algorithm is developed to find the optimal cyclic schedule, a virtual cell’s configuration, and robot waiting time. We illustrate the practicability of the proposed algorithm via several examples, and its superiority over the existing one. Note to Practitioners—This paper addresses the optimal cyclic scheduling problem of wafer-residency-time-constrained single-robotic-arm cluster tools that are used in every wafer fabrication factory. This work for the first time simultaneously adjusts the number of PMs and the robot waiting time given such a cluster tool such that it can be scheduled with the highest productivity. It presents the optimal scheduling method with polynomial complexity. We confirm that the proposed approach can improve schedulability of single-robotic-arm cluster tools over existing methods by using multiple examples. It can thus be readily applied to industrial wafer fabrication.

Scheduling Robotic Two-Cluster Tools in Case of a Process Module Failure*.

Scheduling a Single-Arm Two-Cluster Tool with a Process Module Failure Subject to Wafer Residency Time Constraints

Close-down process scheduling of wafer residence time-constrained multi-cluster tools

Optimizing Close-Down Processes of Single-Robot Cluster Tools Via Linear Programing.

Optimal Integrated Schedule of Entire Process of Dual-Blade Multi-Cluster Tools from Start-Up to Close-Down

Scheduling Transient Processes for Time-Constrained Single-Arm Robotic Multi-Cluster Tools

Closing-Down Optimization for Single-Arm Cluster Tools Subject to Wafer Residency Time Constraints.

Post-processing Time-Aware Optimal Scheduling of Single Robotic Cluster Tools

Petri Net Modeling and Scheduling of a Close-Down Process for Time-Constrained Single-Arm Cluster Tools

Optimally Scheduling Dual-Arm Multi-Cluster Tools to Process Two Wafer Types

Wafer Delay Minimization in Scheduling Single-Arm Cluster Tools with Two-Space Process Modules

Cyclic Scheduling of Multi-Cluster Tools Based on Equivalent Processing Modules

Scheduling Dual-Arm Multi-Cluster Tools With Regulation of Post-Processing Time

Scheduling of Single-Arm Multi-cluster Tools with Wafer Residency Time Constraints in Semiconductor Manufacturing

Optimally Scheduling Single-Arm Multicluster Tools for Manufacturing Hybrid-Type Wafers

Multiobjective Scheduling of Dual-Blade Robotic Cells in Wafer Fabrication

Virtual Cell-Based Scheduling Approach to Single-Robotic-Arm Cluster Tools Subject to Wafer Residency Time Constraints

Schedulability Analysis for Dual-Armed Cluster Tools with Mixed-Processing of Multi-Variety Wafers

Cyclic scheduling of cluster tools with equipment front-end module and multifunctional load locks

Scheduling and Control of Startup Process for Single-Arm Cluster Tools with Residency Time Constraints

Scheduling Single-Arm Multicluster Tools for Two-Type Wafers with Lower-Bound Cycle Time