Effect of Manufacturing Errors on Focusing Performance of Large-Scale Super-Oscillatory Lens

He Tao,Liu Tao,Liu Kang,Li Guoqing,Wang Jiayi,Tian Bo,Yang Shuming
DOI: https://doi.org/10.3788/aos202040.2005001
2020-01-01
Acta Optica Sinica
Abstract:The influence of different manufacturing errors on focusing performance of large-scale super-oscillatory lens (SOL) is revealed through a quantitative study for practical use based on rigorous vector angular spectrum theory. Theoretical calculation results show that the influence of the manufacturing errors on focusing performance of amplitude-type SOL (metallic film) and phase-type SOL (dielectric layer) is the same; central position deviation mainly affects the focusing focal length, while the width deviation mainly influences the focal spot distribution; the position and width deviations within the range of +/- 150 nm arc the maximum allowable manufacturing tolerances for each SOL ring belt. Longitudinal etching depth deviation mainly affects the focused intensity of the phase-type SOL. When the relative phase difference introduced by the etching depth is pi, the focused intensity reaches its maximum. To maintain a greater focused intensity, phase modulation should be kept within the range of 0.8 pi-1.2 pi.
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