Abstract:This paper presents characterization and compensation of the thermal bias drift of a MEMS accelerometer whose effective stiffness is electrostatically tuned to a low value with the help of the single-sided parallel plates (SSPPs) capacitors. A temperature drift model for the proposed accelerometer is built and the temperature effect on the mechanical stiffness and the circuit gains is characterized. The characterization reveals that the variations of the feedforward coefficient including the mechanical stiffness and the readout gain due to the temperature change play a significant role in the bias drift of output of the proposed closed-loop accelerometer. On the other hand, the variations of both feedback gain and tuning gain as a function of temperature are one-order-of-magnitude less than that of the feedforward coefficient. To calibrate the feedforward coefficient, an excitation signal as a form of AC reference displacement is introduced to drive the proof mass and the readout response is demodulated to calibrate the variance of the feedforward coefficient correspondingly. An open-loop compensation scheme for the temperature-induced bias drift using the variance of the calibrated response is proposed accordingly. Alternatively, the calibrated response can be controlled to a preset value by a new proportion integral derivative (PID) controller by the adjustment of the SSPP tuning voltage. The output of the PID controller is used for the calibration of the introduced bias from the electrostatic tuning force. Therefore, a closed-loop compensation of the thermal bias drift is achieved by remaining the feedforward coefficient while eliminating the calibrated bias. Experiments under a temperature cooling process and different tuning voltages are carried out to verify two proposed compensation schemes. The temperature drift coefficients (TDCs) of both compensated outputs exhibit at least one-order-of-magnitude reduction in response to the temperature change. When the effective stiffness of the accelerometer is tuned to about 4.19 N m(-1), the TDC of the compensated output using the proposed open-loop or closed-loop compensation schemes is reduced to about 0.1136 or 0.0391 mg degrees C-1, respectively and meanwhile, the Allan bias instability is slightly increased to 48.63 or 56.14 mu g, respectively.

Temperature Compensation for MEMS Resonant Accelerometer Based on Genetic Algorithm Optimized Backpropagation Neural Network

A Real-Time Temperature Compensation Algorithm for a Force-Rebalanced MEMS Capacitive Accelerometer Based on Resonant Frequency.

Temperature Compensation Method for MEMS Accelerometer Based on Resonant Frequency

Temperature Bias Drift Phase-Based Compensation for a MEMS Accelerometer with Stiffness-Tuning Double-Sided Parallel Plate Capacitors

The Analysis of Temperature Effect and Temperature Compensation of Moems Accelerometer Based on A Grating Interferometric Cavity

Characterization and Compensation of Thermal Bias Drift of a Stiffness-Tunable MEMS Accelerometer

Research of neural network-based model for nonlinear temperature drift compensation of MEMS accelerometers

Temperature Drift Compensation of a Tuned Low Stiffness MEMS Accelerometer Based on Double-Sided Parallel Plates

Temperature Compensation for MEMS Accelerometer Based on a Fusion Algorithm

Temperature Compensation for MEMS Gyroscope Based on Hierarchical Genetic Algorithm and RBF Neural Network

A Temperature Compensation Approach for Micro-Electro-Mechanical Systems Accelerometer Based on Gated Recurrent Unit–Attention and Robust Local Mean Decomposition–Sample Entropy–Time-Frequency Peak Filtering

An Improved Difference Temperature Compensation Method for MEMS Resonant Accelerometers

Design of MEMS High-G Micro Accelerometer Temperature Compensation

Temperature Compensation of MEMS Resonant Accelerometers with an On-Chip Platinum Film Thermometer

Compensation of Temperature Effects in Force-Balanced Microelectromechanical System Accelerometers

In-Situ Compensation on Temperature Coefficient of the Scale Factor for a Single-Axis Nano-g Force-Balance MEMS Accelerometer

Temperature Compensation of MEMS Accelerometer in Attitude Heading Reference Systemm

Combined Temperature Compensation Method for Closed-Loop Microelectromechanical System Capacitive Accelerometer

Temperature Drift Compensation of a MEMS Accelerometer Based on DLSTM and ISSA

Temperature drift modeling and compensation of capacitive accelerometer based on AGA-BP neural network

Thermal Modeling and Compensation of MEMS Accelerometer