Chalcogenide Photonic Integration at 2 Micron with Improved Wavelength and Fabrication Dependency

Weihong Shen,Pingyang Zeng,Jiangbing Du,Bin Zhang,Zhaohui Li,Ke Xu,Zuyuan He
DOI: https://doi.org/10.1364/cleo_si.2020.sth4l.3
2020-01-01
Abstract:Grating coupler and mode converter working at 2-micron waveband were fabricated on the 600-nm-thick As2S3-on-oxide platform. Both simulation and experiment results indicate that 2-micron As2S3 components has broadened wavelength bandwidth and improved fabrication tolerance.
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