Single Nanoparticle Detection with CMOS-Compatible Heterodyne Interferometry

Ming Jin,Shui-Jing Tang,Hao-Wen Shu,Yuan-Sheng Tao,Xing-Jun Wang,Yun-Feng Xiao
DOI: https://doi.org/10.1364/cleo_si.2020.sf2n.7
2020-01-01
Abstract:We introduce a CMOS-compatible waveguide interferometry for single nanoparticle detection using optical dark-field scattering and heterodyne technique. The integrated sensor is capable of detecting single 40-nm-radius nanoparticles with a signal-to-noise ratio of 13 dB.
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