Abstract:The combined atomic/molecular layer deposition (ALD/MLD) technique is emerging as a state-of-the-art synthesis route for new metal-organic thin-film materials with a multitude of properties by combining those of the inorganic and the organic material. A major part of the studies so far reported have focused on aluminum or zinc alkyls, so-called alucone and zincone films, typically grown from trimethyl aluminum (TMA) or diethyl zinc (DEZ) as the metal-bearing precursor, and a simple aliphatic bi-functional alcohol molecule such as ethylene glycol (EG) as the organic precursor. However, these common precursors possess certain disadvantages: both TMA and DEZ are pyrophoric, DEZ being additionally thermally unstable, while EG has a strong tendency for various unideal reaction modes. Here we report novel ALD/MLD processes for alucone and zincone films based on non-pyrophoric bis-diisopropylamido-[3-(N,N-dimethylamino)propyl] aluminum(III) [Al(NiPr2)2(DMP)] and bis-3-(N,N-dimethylamino)propyl zinc(II) [Zn(DMP)2] precursors in combination with hydroquinone (HQ) as the organic precursor. We demonstrate that the [Al(NiPr2)2(DMP)] + HQ and [Zn(DMP)2] + HQ ALD/MLD processes work even at record low deposition temperatures (140 °C and 60 °C, respectively) yielding high-quality and relatively stable Al-HQ and Zn-HQ thin films with appreciably high growth rates (2.8 Å / cycle and 3.2 Å / cycle, respectively). Moreover, these ALD/MLD processes are compatible with the corresponding ALD processes, i.e. [Al(NiPr2)2(DMP)] + H2O and [Zn(DMP)2] + H2O, for the Al2O3 and ZnO films, thus opening up new horizons for the fabrication of novel metal-oxide : organic superlattice structures for e.g. flexible gas-barrier coatings or wearable thermoelectrics.

One-step Facile Preparation of Zinc-Based Hydroquinone Hybrid Nanoporous Thin Films by Molecular Layer Deposition

Facile Conversion of Hydroxy Double Salts to Metal-Organic Frameworks Using Metal Oxide Particles and Atomic Layer Deposition Thin-Film Templates

Study on Porosity in Zinc Oxide Ultrathin Films from Three-Step MLD Zn-Hybrid Polymers

Preparation of polycyclosiloxane/ZnO nanoparticle hybrid ultrathin films by Layer-by-Layer assembly methods

Electrochemical Deposition of ZnO Hierarchical Nanostructures from Hydrogel Coated Electrodes

Fabrication of a stable inorganic-organic hybrid multilayer film with uniform and dense inorganic nanoparticle deposition.

Highly Integrated Organic-Inorganic Hybrid Architectures by Non-Covalent Exfoliation of Graphite and Assembly with Zinc Oxide Nanoparticles

Ductile Polyimide/Reduced Graphene Oxide Nanohybrid Films with Porous Structure Fabricated by a Green Hydrogel Strategy

Low-temperature ALD/MLD growth of alucone and zincone thin films from non-pyrophoric precursors

Highly atom-economic synthesis and scale-up production of zinc-aluminum layered double hydroxides

A Biomimetic Chemical Approach to Facile Preparation of Large‐Area, Patterned, ZnO Quantum Dot/Polymer Nanocomposites on Flexible Plastics

Hydrophobic Modification of Zno Nanostructures Surface Using Silane Coupling Agent

A General Strategy for Facile Synthesis of Ultrathin Transition Metal Hydroxide Nanosheets

Novel Synthesis of Layered Double Hydroxides (ldhs) from Zinc Hydroxide

Synthesis of the Porous ZnO Nanosheets and TiO2/ZnO/FTO Composite Films by a Low-Temperature Hydrothermal Method and Their Applications in Photocatalysis and Electrochromism

Preparation of Nanoporous Molybdenum Film by Dealloying an Immiscible Mo–Zn System for Hydrogen Evolution Reaction

‘Sandwich’-like hybrid ZnO thin films produced by a combination of atomic layer deposition and wet-chemistry using a mercapto silane as single organic precursor

Hierarchical ZnO films with microplate/nanohole structures induced by precursor concentration and colloidal templates, their superhydrophobicity, and enhanced photocatalytic performance

A Facile Approach for the Fabrication of Au/Zno-Hollow-Sphere-Monolayer Thin Films and Their Photocatalytic Properties

Zinc Peroxide Nanoparticles: Micellar Synthesis and Preparation of Films

One-Step Hydrothermal Synthesis of Comb-Like Zno Nanostructures