Temperature-Compensated pH Microelectrode Array Sensors Based on Copper-Oxide/Polyaniline Modification

Xin Wang,Lining Sun,Tian Wang,Yunbo Shi
DOI: https://doi.org/10.1109/JSEN.2020.3010709
IF: 4.3
2020-01-01
IEEE Sensors Journal
Abstract:pH is an important indicator of water quality. Therefore, developing accurate, efficient, and economical pH sensors is crucial. This paper presents a low-cost and highly robust miniature pH sensor chip with a temperature compensation function. The chip was manufactured using microelectricalmechanical systems technology. The surface of the chip comprised three three-electrode pH sensors and a Pt resistance temperature sensor. Moreover, CuO/polyaniline was modified for use as a pH-sensing material in the chip. To compensate for the temperature, a sandwich-plate sensor was utilized, which was integrated with a platinum-resistance heater. The experimental results show that the pH sensor had a high sensitivity of 0.288 mA/pH and high linearity of R-2 = 0.9998. Furthermore, the response time of the chip was less than 4 s, the sensitivity of the temperature sensor was 0.949 Omega/degrees C, and the sensitivity of the temperature variations to the power of the heater was 0.3126 degrees C/mW. Finally, the pH sensor chip was further calibrated via multiple linear regression. Compared with commercial pH meters, the chip demonstrated high accuracy and remarkable temperature compensation.
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