Microplasmas: Sources, Particle Kinetics, and Biomedical Applications

Felipe Iza,Gon Jun Kim,Seung Min Lee,Jae Koo Lee,James L. Walsh,Yuantao T. Zhang,Michael G. Kong
DOI: https://doi.org/10.1002/ppap.200700162
IF: 3.877
2008-01-01
Plasma Processes and Polymers
Abstract:Thanks to their portability and the non-equilibrium character of the discharges, microplasmas are finding application in many scientific disciplines. Although microplasma research has traditionally been application driven, microplasmas represent a new realm in plasma physics that still is not fully understood. This paper reviews existing microplasma sources and discusses charged particle kinetics in various microdischarges. The non-equilibrium character highlighted in this manuscript raises concerns about the accuracy of fluid models and should trigger further kinetic studies of high-pressure microdischarges. Finally, an outlook is presented on the biomedical application of microplasmas.
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