Micro-discharge and Its Applications

Jiting OUYANG,Yu ZHANG,Yu QIN

DOI: https://doi.org/10.13336/j.1003-6520.hve.20160308006

2016-01-01

Abstract:Micro-discharge happens in a limited space.The gap spacing has the magnitude of sub-millimeters or below.Compared with the traditional gas discharge, micro-discharge has some unique characteristics due to the micro-scale and hence attracts a great amount of interest.On one hand, the micro-discharge system is easy to be miniaturized thus having great potential in applications such as biomedicine, micro-region thermal cooling, micro-electro-mechanical system, ionic blower, electrostatic-fluid accelerator, gas sensor, ion sources, liquid discharge technic, and electrostatic detection.On the other hand, accompanying with the rapid development of integrated circuits, micro-electronics technology and micro-electro-mechanical systems, the dimension of the conductor electrodes as well as the gap spacing between them has been sharply reduced.A possible risk comes from electrostatic discharge under low voltage breakdown that could turn to a hazard source for micro-electronics, initiate explosive materials or devices as well as electric power system.We review and summarize numerous experimental, computational and analytical works on micro-discharge and micro-plasma in recent years, and introduce progress in understanding the mechanisms and physics of micro-discharge and in the applications.