Abstract:This paper reports a novel capacitive sensing method, enabling accurate and self-calibrated measurements for both the amplitude and phase information in sinusoidal motion. The approach constructively utilizes the inherent nonlinearity of a triangular-electrode based (TEB) variable-area sense capacitor. In the case of TEB detection signal, two harmonics exist and each carries information about the motional amplitude and phase. The TEB method robustly extracts the motional amplitude from the ratio of two sideband amplitudes and extracts the motional phase from the subtraction of two sideband phases. This technique is especially valuable for capacitive detection of periodic motion in MEMS resonant devices, such as the resonant accelerometer and Coriolis vibratory gyroscope. The paper presents detailed theoretical analysis and proposes a real-time measurement algorithm implemented in an FPGA device. Experimental results manifest that, compared with the traditional linear method, the sensitivity of the measured amplitude and phase to system parameter variations is highly suppressed up to 95%. Furthermore, an oscillation control system with TEB capacitive detection is introduced for micro-machined vibratory gyroscopes. First measurement results show the amplitude variance of the drive displacement is 120 ppm in an hour while the phase variance is 80 ppm. Allan variance analysis indicates a bias instability of 6.5 degrees/h for the gyroscope output. (C) 2016 Elsevier B.V. All rights reserved.

(Invited) Equivalent Circuit Representation of Resonant Accelerometer

Research of Coupling Coefficient Extraction of a Cavity Resonator

Design of Force-Balance Capacitive Accelerometer

A Novel Triangular-Electrode Based Capacitive Sensing Method for MEMS Resonant Devices

Analysis of the Effect of the Equivalent Parallel Resistor of theComb Capacitive Accelerometer

An LC Resonant Method for the Accurate Extraction of Small Parasitic Resistance

Equivalent circuit of piezoelectric resonant disk gyroscope through admittance circle method

RESEARCH ON A MICRO-ACCELEROMETER’S SYSTEMIC MODELING BASED ON EQUIVALENT CIRCUIT METHOD

Precise derivation for the equivalent circuit parameters of a crystal resonator with series capacitor.

Structural Design and Testing of a Micromechanical Resonant Accelerometer

System-level Modeling and Simulation for an Electrostatic-Feedback Microaccelerometer Based on Equivalent Electrical Representation

Coupled Double Closed-Loop Control for an MEMS Resonant Accelerometer

A micromachined resonant accelerometer

Design and Optimization of the Resonator in a Resonant Accelerometer Based on Mode and Frequency Analysis

Equivalent Circuit Analysis of 'U'-Shaped Split Ring Resonators

Equivalent Amplitude Model for a Giant Magnetostrictive Transducer Based on an Unsteady Electromechanical Conversion Coefficient

A method of measuring equivalent parameters of quartz crystal resonators

Equivalent Circuit for Unloaded Triple-Layer Piezoelectric Cantilevers

Analysis And Modeling Of Fano Resonances Using Equivalent Circuit Elements

Equivalent resonators of multielement resonators

Series Resistance Method to Obtain Equivalent Circuit of Piezoelectric Resonator