Tribological Properties of CrN/TiN Superlattice Coatings Deposited by Deep Oscillation Magnetron Sputtering

Ou Yixiang,Wang Haoqi,Pang Pan,Luo Jun,Chen Lin,Liao Bin,Lei Mingkai,Ouyang Xiaoping
2020-01-01
Rare Metal Materials and Engineering
Abstract:Tribological properties of CrN/TiN superlattice coatings deposited on IN 718, WC-6%Co and Si(100) by the combined deep oscillation magnetron sputtering were investigated. The results show that the coating growth is independent of the nature of substrate materials. As the hardness of substrate materials is increased, the scratch critical loads increase. Adhesion failure mode changes from buckling failure to cooperative deformation of substrate/coating system with only small cracks in the whole scratch track. Wear mechanism of the coatings deposited on IN 718 and WC-6%Co changes from abrasive and oxidative wear to mild abrasive wear under a normal load of 2 N. Under a normal load of 4 N, the coatings on IN 718 suffer severe oxidative wear, while the coatings on WC-6%Co suffer the combined abrasive and oxidative wear. The production, accumulation and mass transfer of oxides result in the oscillation of friction coefficient during dry sliding wear tests.
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