Modal-Decomposition-Dependent State-Space Modeling and Modal Analysis of a Rigid-Flexible, Coupled, Multifreedom Motion System: Theory and Experiment

Qian Tang,Fuyu Guo,Tao Huang,Kaiming Yang,Yu Zhu,Min Li
DOI: https://doi.org/10.1155/2020/8859222
IF: 1.616
2020-01-01
Shock and Vibration
Abstract:In a multiple degrees of freedom motion system with rigid-flexible coupling, the flexible internal dynamics have a significant negative impact on performance because the degrees of freedom are coupled. Inspired by this problem, a multi-input multioutput state-space model based on modal coordinates is proposed to decouple the rigid body and flexible modes. The closed-loop subspace identification method based on orthogonal is utilized to develop an unbiased standard state-space model. Based on the similarity principle, a modal analysis method is proposed to transfer the standard state-space model to the proposed modal-decomposition-dependent state-space model. Controllability and observability criteria are met to guarantee the minimum realization of the proposed state-space model. Finally, a modeling and modal analysis experiment is conducted on a developed wafer stage of lithographic tool. The results verify the effectiveness and accuracy of the proposed modeling method, as well as the controllability and observability of the proposed model.
What problem does this paper attempt to address?