Ultra-high Efficient Integrated Microchannel Cooling for Multi-unit Microsystems

Jiejun Wang,Tao Wang,Qiuyan Li,Yiming Li,Wenbo Luo,Yao Shuai,Chuangui Wu,Wanli Zhang
DOI: https://doi.org/10.1109/icept47577.2019.245098
2019-01-01
Abstract:An ultra-high efficient single-phase silicon microchannel cooler is presented. Heat flux of 707.6W/cm 2 can be dissipated with extremely low coolant flow rate of 45ml/min. Moreover, the presented cooler can simultaneously cool four individual heaters effectively and uniformly. This work may help to address the thermal issue and improve the reliability of multi-unit microsystems.
What problem does this paper attempt to address?