Dielectric Nanoaperture Metasurfaces in Silicon Waveguides for Efficient and Broadband Mode Conversion with an Ultrasmall Footprint

Chaonan Yao,Yilun Wang,Jihua Zhang,Xinliang Zhang,Chen Zhao,Bin Wang,Subhash C. Singh,Chunlei Guo
DOI: https://doi.org/10.1002/adom.202000529
IF: 9
2020-01-01
Advanced Optical Materials
Abstract:Efficient and reliable mode converters with broadband operation and small footprint will enable high-density silicon photonic integrated circuits to build high bitrate optical networks and handheld optical devices. Here, all-dielectric nanoaperture metasurfaces in the silicon layer of a silicon-on-insulator platform are reported for mode-order conversion with an ultrasmall footprint. Utilizing the advantages of an abrupt width change and metasurface, the mode conversion between TE00 and TE10 modes is realized with a conversion efficiency as high as approximate to 90% in simulations and 83.1% in experiments at lambda = 1.55 mu m within an ultrashort conversion length of about 2.42 mu m, the shortest ever achieved. The incident TE00 mode is converted to TE10 mode with purity of more than 90% in a broadband (Delta lambda approximate to 230 nm) wavelength range from 1.42 to 1.65 mu m. Moreover, optimizing the number, position, and dimension of nanoapertures, it is further demonstrated that the nanoaperture metasurface design can enable mode conversion between silicon waveguides of different thicknesses and different relative positions, and between TM modes.
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