Research on Motion Stability Measurement of Guide Rails Based on Position Sensitive Detector

Yuanyuan Zou,Xiaojin Zhang,Dazhong Guo,Sijun Zhu,Dong Chen
2011-01-01
Abstract:Position Sensitive Detector (PSD) is widely used in vibration measurements and precision displacement measurements due to its high-speed response, high position resolution and noncontact. An approach for measuring the motion stability of guide rails in two dimensions based on PSD is proposed in this paper. The measurement system is designed and the measurement errors are analyzed in detail. The experiments of repeatability and measuring for motion stability in different velocities have been carried out. The practical results show this approach could be used for measuring the motion stability of guide rails in two dimensions with features of high precision, full-range and continuous.
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