Application of channeling effect in estimating the thickness of TEM sample

Yue-liang LI,Jing? ZHU
DOI: https://doi.org/10.3969/j.1000-6281.2014.06.001
2014-01-01
Abstract:Channeling effect is the periodic thickness effect of exit wave function, causing the column intensity in aberration?corrected HRTEM image periodically changing as the thickness of TEM sample increases. In this work, we proposed a method of estimating the thickness of TEM sample by channeling effect. Influences of parameters, such as element, defocus, astigmatism and tilt, were studied by multi?slice simulation. Thethickness of BaTiO3 ceramic sample was estimated as an example.
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