Abstract:3D printing of metallic microstructures is highly desirable for many practical applications such as microelectronics, terahertz photonics, microelectromechanical systems, and electrochemisty. Unfortunately, high resolution microprinting of 3D metal structures with widely tunable feature sizes, high conductivities, high melting points, and highly smooth surfaces remains challenging for current microfabrication technologies. Herein, 3D printing of metallic microstructures of feature sizes ranging from ≈10 to ≈200 μm by combining femtosecond laser micromachining of 3D glass microchannels and microfluidic electroless plating is demonstrated. The proposed technique allows for producing 3D metallic structures of almost arbitrary geometries embedded in glass since the continuous flow of the plating solution enables controllable deposition of metal films inside the through microchannels. Moreover, freestanding metallic 3D microstructures are fabricated by removing the glass matrix with a wet chemical etching. As a nonthermal processing, the surface roughness of the fabricated metallic structures is as low as ≈20 nm. The 3D microstructures can be made of either silver or copper covered with a thin layer of silver, which are shown to have a high conductivity. As a proof‐of‐concept demonstration, a 3D metal scaffold structure with a size of ≈5 × 5 × 2 mm3 is printed. Glass‐channel molding assisted 3D printing of free‐standing metal microstructures is demonstrated using femtosecond laser internal processing and microfluidic electroless plating. Using this approach, 3D metal microstructures with widely tunable feature sizes (10–200 µm), flexible configurations, high conductivity, and high surface smoothness can be printed.

Construction of metallic glass structures by laser-foil-printing technology

3D Printing of Large, Complex Metallic Glass Structures

Evolution of Crystalline Phase During Laser Processing of Zr-based Metallic Glass

Building Metallic Glass Structures on Crystalline Metal Substrates by Laser-Foil-Printing Additive Manufacturing

Building Zr-based Metallic Glass Part on Ti-6Al-4V Substrate by Laser Foil-Printing Additive Manufacturing

Mechanical Properties of Zr-based Bulk Metallic Glass Parts Fabricated by Laser-Foil-printing Additive Manufacturing

Crystallization Morphology and Evolution Mechanism of Laser Multiple Remelting of Zr55Cu30Al10Ni5 Metallic Glass

Additive manufacturing of Zr-based metallic glass structures on 304 stainless steel substrates via V/Ti/Zr intermediate layers

Fabrication of Zr-based bulk metallic glass lattice structure with high specific strength by laser powder bed fusion

Additive Manufactured Large Zr-Based Bulk Metallic Glass Composites with Desired Deformation Ability and Corrosion Resistance

Structural Periodicity in Laser Additive Manufactured Zr-based Bulk Metallic Glass

Distinct Mechanical Properties and Stability in Zr-Based Metallic Glasses Fabricated by Conventional Quenching and Atomic Manufacturing

Crystallization in additive manufacturing of metallic glasses: A review

Advanced structural analysis of a laser additive manufactured Zr-based bulk metallic glass along the build height

Structural investigations of Fe-Zr-Si-Cu metallic glass with low glass-forming ability produced in laser powder bed fusion technology

Glass‐Channel Molding Assisted 3D Printing of Metallic Microstructures Enabled by Femtosecond Laser Internal Processing and Microfluidic Electroless Plating

Laser Solid Forming Zr-Based Bulk Metallic Glass

An Unusual Solid State Amorphization in a TiZr-base Bulk Metallic Glass Composite Fabricated by Laser Powder Bed Fusion

Controlling the Glassy State toward Structural and Mechanical Enhancement: Additive Manufacturing of Bulk Metallic Glass Using Advanced Laser Beam Shaping Technology (Adv. Funct. Mater. 12/2024)

Structural evolutions in 3D-printed Fe-based metallic glass fabricated by selective laser melting

Structural heterogeneity in 3D printed Zr-based bulk metallic glass by selective laser melting