High definition X-ray Source based on Carbon Nanotube Emitter for Micro CT application

LI Xiaobing,Menglong LIU,Juntao ZHOU,WU Xuanyi,WU Qingyang,Liang REN,Jiewen ZHENG,Zexiang CHEN
2019-01-01
Abstract:A micro-focus CNT-based X-ray tube was developed successfully, in which CNT circular rings grown by microwave plasma CVD employed field emission cathode to obtain large and stable emission current. The size of the CNT ring is 50 micrometer in diameter and the wall thickness is 2 micro meter. A high convergence ratio electron gun with grid gate and focus electrode was designed for this X-ray tube to achieve a micron level X-ray focal spot. The full vacuum-sealed micro-focus CNTbased X-ray tube exhibited a very small focal spot with a diameter of about 5 micro meters and stable current of more than 50 μA, the corresponding average field emission current density of the CNT emitter is more than 2.55A/cm. The X-ray images of IC indicated this CNT x-ray source is competent for high definition DR and micro CT application.
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