Abstract:As a prototype single-phase multiferroic, BiFeO3 exhibits excellent electrical, magnetic, and magnetoelectric properties, appealing to many modern technological applications. One of its overlooked merits is a high piezoelectric performance originating from its large remnant polarization (P-r) and low dielectric constant (epsilon(r)). Furthermore, its high Curie temperature and large coercive field ensure good stabilities in device applications. However, to achieve close-to-intrinsic properties, a high processing temperature is usually used for the preparation of highly crystalline (epitaxial or highly oriented) BiFeO3 films. Proliferation of defects due to loss of volatile Bi2O3 in the high-temperature process and its incompatibility with CMOS-Si technologies have hindered the development of BiFeO3 film-based piezoelectric micro-electro-mechanical systems (piezo-MEMS) devices. In this work, we successfully sputter-deposited highly (100) oriented BiFeO3 thick films (similar to 1 mu m) on Si at 350 degrees C through the use of a conductive perovskite buffer layer of LaNiO3. Formation of bulk and interfacial defects is suppressed by the combination of a low deposition temperature and an oxygen-rich processing atmosphere, resulting in chemically stoichiometric BiFeO3 films. These films displayed a high P-r (similar to 60 mu C.cm(-2)), a low epsilon(r) (similar to 200), and a small dielectric loss (<0.02), as well as large coercive and self-bias voltages in their as-grown and aged states. Together with a large transverse piezoelectric coefficient (e(31,f) similar to -2.8 C.m(-2)), excellent electromechanical performances with outstanding fatigue and aging resistances are demonstrated in patterned BiFeO3-Si cantilever devices. These integration-friendly BiFeO3 films are ideal replacements of PZT films in piezo-MEMS applications.

Integration-Friendly, Chemically Stoichiometric BiFeO3 Films with a Piezoelectric Performance Challenging That of PZT.

Large electric‐field‐induced strain and enhanced piezoelectric constant in CuO‐modified BiFeO3‐BaTiO3 ceramics

Rhombohedral BiFeO3 Thick Films Integrated on Si with a Giant Electric Polarization and Prominent Piezoelectricity

Spin-coated BiFeO3 Films on Si Wafers: Low Processing Temperature but Prominent Piezoelectricity

In Situ Formation of Composite Thin Film with (111) Oriented Ni0.5Zn0.5Fe2O4 Pillar Array Surrounded by BaTiO3 for Ferroelectric-Ferromagnetic Coupling

High Depolarization Temperature and Superior Piezoelectric Performance with Complex Structural Evolution in BiFeO3PbTiO3–(Sr0.7Bi0.2□0.1)TiO3 Systems

Facile Preparation and Performance of Novel High-Tc Xbi(ni1/2ti1/2)o3-(1-x)pb(zr1/2ti1/2)o3 Piezoceramics

Ferroelectric and piezoelectric characteristics of epitaxial BiFeO3 films sputtered on different oxide bottom electrodes

Super-R BiFeO$_3$: Epitaxial stabilization of a low-symmetry phase with giant electromechanical response

Enhanced Piezoelectricity and Excellent Thermal Stability in Sm 3+ -Doped BiFeO 3 -PbTiO 3 Ceramics

High-field dielectric properties and high-power performance of Fe-modified PZN–PMS–PZT piezoelectric ceramics

Large electric field-induced strain in BiFeO3-based ceramics by tuning defect dipoles and phase structure

Room-temperature Ferrimagnetic Multiferroic BiFe0.5Co0.5O3 Thin Films with Giant Piezoelectric Response

Investigation of nonstoichiometric Fe on the ferroelectric properties of BiFeO3-based piezoelectric ceramics

The development of BiFeO 3 -based ceramics

Structure, Ferroelectric and Piezoelectric Properties of Multiferroic Bi0.875Sm0.125FeO3 Ceramics

Anisotropic epitaxial stabilization of a low-symmetry ferroelectric with enhanced electromechanical response

Giant Electro-Strain Nearly 1% in BiFeO3-based Lead-Free Piezoelectric Ceramics Through Coupling Morphotropic Phase Boundary with Defect Engineering

Achieving high Curie temperature and prominent piezoelectric response via site engineering for BiFeO3-BaTiO3 ceramics

The Development of BiFeO3-based Ceramics

Outstanding Ferroelectricity in Sol-Gel-Derived Polycrystalline BiFeO3 Films within a Wide Thickness Range