Nanoscale Infrared Spectroscopy Characterization of Graphite Mesa Microstructure

SHI Yunsheng,LIU Bingqi,YANG Xing
2016-01-01
Abstract:The graphite mesa microstructure with the atomically flat surface is an important basis for the realization of the special function of MEMS devices and micro systems. Chemical information characterization of graphite microstructure has important significance on the manufacture and properties of MEMS devices and micro systems. Atomic force microscopy was used to obtain the morphology information, and then the different regions of the microstructure were characterized by the nanoscale infrared spectroscopy. Through the analysis of the infrared spectra, it is found that the surface of the graphite mesa has a very ordered carbon hexatomic ring structure with respect to the other places, and adsorbs least water molecules. The edge of the graphite mesa microstructure adsorbed most water molecules because of the dangling bond and microfabrication. The graphite substrate has no carbon hexatomic structure due to the destruction of the microfabrication. This information helps to understand the chemical state of the microstructure. Above information can make it clear that the influence of the environment on the different regions of graphite mesa microstructure and can also guide the manufacture and application of MEMS devices.
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