Dual-frequency Self Temperature Sensing and Temperature Compensation of Quartz Resonator Force Sensor

王喆垚,朱惠忠,董永贵,冯冠平
DOI: https://doi.org/10.3969/j.issn.1004-2474.2001.01.017
2001-01-01
Abstract:This paper describes a novel method to realize the temperaturecompensation of AT-cut quartz crystal resonator force sensors based on dual-frequency oscillating.The fundamental and the third overtone frequencies are both force and temperature cross sensitive.The normalized beat frequency between the third overtone frequency and 3 times of the fundamental frequency is almost linear to the temperature changes and is force independent.By stimulating the dual frequencies simultaneously,the temperature changes can be obtained by the beat frequency.This new method can eliminate the thermal lag due to the difference in thermal time constants of the resonator and the thermistor,and can overcome the limitation of temperature gradient.The implementation of the self temperature sensing method and temperature compensation are described and experimental data are discussed.
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